Electron-electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.
Keywords: High-throughput imaging; multibeam; parallel data acquisition; scanning electron microscopy.
© 2015 The Authors Journal of Microscopy © 2015 Royal Microscopical Society.